SFS Module 200 sccm
SFS Module 200 sccm
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Pt100 class F0.15 with Ni/Au wires, with optimized ESD design
Pt100 class F0.15 with Ni/Au wires, with optimized ESD design
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SFS Module 50 sccm

Thermal mass flow module with linearized digital/analog output

Fast and compact flow module, suitable for gas dosing systems, manifolds, and analyzers. Easy to integrate with a compact design, factory calibration, and pins for HW address setting

Fluidic interface compatible with mass flow meter OEM (Axetris MFM 2020, MFM 2021, MFM 2xxx)

Product Name

SFS01-M-01-00050

Operating flow range

+/-50 sccm (ml/min)

Measured medium

Gas Flow

Operating temperature range

0 to 80 °C

Housing dimensions

48 x 34 x 14.5 mm

Housing material

Aluminum, FR4

Fluidic connection

Ø 2.2 mm i.D. flat gasket

Wetted materials

Aluminum, gold, FR4, silicon, silicon nitride, epoxy, nitrile

Connection type

PCB connector JST SM08B-SRSS-TB

Response time t63

20 ms

Weight

30 g

Supply voltage

5V DC +/-5%

Output signal

I2C or 0 to 1 V

Accuracy

2% f.s. (digital output)

Repeatability

Repeatability

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Datasheet
Application Note

Description

Thermal mass flow module with linearized digital/analog output

Fast, compact flow module suitable for gas dosing systems, manifolds, and analyzers. Easy to integrate with a compact design, factory calibration, and pins for HW address setting

Fluidic interface compatible with mass flow meter OEM (Axetris MFM 2020, MFM 2021, MFM 2xxx)

  • Benefits & Characteristics of the SFS01

    • Very fast response time <5 ms
    • Very low energy consumption
    • Easy system integration, including temperature compensation

  • Product description SFS01

    The SFS is a flow sensor based on silicon technology. It is operated according to the calorimetric principle and can therefore detect not only the flow velocity but also the flow direction.

    The symmetrical design of the SFS flow sensor allows an easy interpretation and evaluation of the measurement signal. The sensor can be used in different gases. It is characterized by a high sensitivity, a very fast response time and an extremely low energy consumption.

    Well-adapted channel geometries allow the performance of the sensor to be optimally aligned to the desired application. The SFS01 flow sensor is ideally suited for space-limited applications, but can also be easily upgraded to complete ready-to-use systems.

    Suitable application areas for the SFS01 flow sensor are flow measurements in battery-operated/portable devices, air conditioning technology (HVAC), automation technology, as well as process and control engineering.